PANGPAIBOON, N. Properties of aluminum oxynitride (AION) thin film grown by reactive RF magnetron sputtering. Asia-Pacific Journal of Science and Technology, [S. l.], v. 13, n. 6, p. 755–758, 2017. Disponível em: https://so01.tci-thaijo.org/index.php/APST/article/view/83694. Acesso em: 30 sep. 2026.