The relation of carbon non-uniformity and deflect coil tilt angle in a diamond-like carbon coating process using a mathematical model

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Panuwong Yokying
Kiatfa Tangchaichit

Abstract

Today, improvement in the performance of diamond-like carbon (DLC) film has allowed its growth in the surface overcoat field. Various researchers have used new methods and technology for DLC performance improvement. This research investigated the relationship of carbon non-uniformities and deflect coil tilt angle for improvement carbon uniformity and prediction using mathematical modelling. The experiment was designed using a DOE method and regression to find the proper prediction equation. Samples used were single side polished/etched germanium wafers prepared by coating them with graphite from high purity rods. The conditions were controlled as follows: 30 Å etching depth, 6 Å adhesive thickness, and 400 pulses of DLC. XRF was used for thickness measurements. Minitab was used for mathematical modelling and regression analysis. The equations were evaluated to find the one with the least percent error. A sixth order equation gave the least percent error.

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