The relation of carbon non-uniformity and deflect coil tilt angle in a diamond-like carbon coating process using a mathematical model
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Abstract
Today, improvement in the performance of diamond-like carbon (DLC) film has allowed its growth in the surface overcoat field. Various researchers have used new methods and technology for DLC performance improvement. This research investigated the relationship of carbon non-uniformities and deflect coil tilt angle for improvement carbon uniformity and prediction using mathematical modelling. The experiment was designed using a DOE method and regression to find the proper prediction equation. Samples used were single side polished/etched germanium wafers prepared by coating them with graphite from high purity rods. The conditions were controlled as follows: 30 Å etching depth, 6 Å adhesive thickness, and 400 pulses of DLC. XRF was used for thickness measurements. Minitab was used for mathematical modelling and regression analysis. The equations were evaluated to find the one with the least percent error. A sixth order equation gave the least percent error.
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References
[2] Bewilogua, K., Hofmann, D., 2014. History of diamond-like carbon films - from first experiments to
worldwide applications. Surface and Coatings Technology 242, 214-25.
[3] Hee, A.C., Zhao, Y., Choudhury, D., Ghosh, S., Zhu, Q., Zhu, H., 2016. Tribological behavior of
hydrogenated diamond-like carbon on polished alumina substrate with chromium interlayer for biomedical
application. Biotribology 7, 1-10.
[4] Robertson, J., 2002. Diamond-like amorphous carbon. Materials Science and Engineering: Research Reports
37, 129-281.
[5] Swiatek, L., Olejnik, A., Grabarczyk, J., Jedrzejczak, A., Sobczyk-Guzenda, A., Kaminska, M., Jakubowski,
W., Szymanski, W., Bociaga, D., 2016. Multi-doped diamond like-carbon coatings (DLC-Si/Ag) for
biomedical applications fabricated using the modified chemical vapour deposition method. Diamond &
Related Materials Complete, 54–62.
[6] Deng, X., Takaoka, Y., Kousaka, H., Umehara, N., 2014. Axial uniformity of diamond-like carbon film
deposited on metal rod by using microwave–sheath voltage combination plasma. Surface and Coatings
Technology 238, 80-86.
[7] Chao, T.M., Tan, A.H., 2013. DLC deposition parameters optimization for head disk design interface with
a thermal protrusion slider from tribological point of view. Materials & Design 48, 58-67.
[8] Hang, L., Yin, Y., Xu, J., 2006. Optimisation of diamond-like carbon films by unbalanced magnetron
sputtering for infrared transmission enhancement. Thin Solid Films 515, 357-361.
[9] Ohlídal, I., Nečas, D., Franta, D., Buršíková, V., 2009. Characterization of non-uniform diamond-like carbon
films by spectroscopic ellipsometry. Diamond and Related Materials 18, 364-367.
[10] Zhu, J., Han, J., Han, X., Meng, S., Liu, A., He, X., 2006. Optical properties of amorphous diamond films
evaluated by non-destructive spectroscopic ellipsometry. Optical Materials 28, 473-479.
[11] Yamamoto, T., Hyodo, H., 2003. Amorphous carbon overcoat for thin-film disk. Tribology International 36,
483-487.
[12] Srisang, C., Asanithi, P., Siangchaew, K., Pokaipisit, A., Limsuwan, P., 2012. Characterization of SiC in
DLC/a-Si films prepared by pulsed filtered cathodic arc using Raman spectroscopy and XPS. Applied
Surface Science 258, 5605-5609.
[13] Murata, Y., Choo, C.-K., Ono, H., Nagai, Y., Tanaka, K., 2016. Characterization of N-doped DLC Thin
Films Prepared by Hydrocarbons Pyrolysis Method. Materials Today: Proceedings 3, S197-S202.
[14] Bociaga, D., Kaminska, M., Sobczyk-Guzenda, A., Jastrzebski, K., Swiatek, L., Olejnik, A., 2016. Surface
properties and biological behaviour of Si-DLC coatings fabricated by a multi-target DC–RF magnetron
sputtering method for medical applications. Diamond and Related Materials 67, 41-50.