Local photomask fabrication capability to suppot hard-disk drive manufacturing in Thailand

Abstract

This paper reports the status of mask making tools and processes at Thai microelectronics Center (TMEC) in Thailand. In addition, the applications employing those masks fabricated which are used in Thai academic and Thai industries especially the Hard-Disk Drive (HDD) industry which contributes substantial amount to Thailand Gross Domestic Productivity (GDP). In this respect, local mask making capability could increase the local content and lead to the development of prospective upstream high technology such as semiconductor fabrication in Thailand