Improvement bar sitting process step in air bearing surface patterning by using micropallette

Abstract

      A read/write head of the Hard Disk Drive (HDD) has to go through several process steps from reader/writer fabrication process and then to wafer dicing into bars containing several read/write heads. These bars will have to go through Air Bearing Surface (ABS) forming process in order to ensure that the read/write head does not touch a spinning media. At the very beginning of the ABS formation process, the bars need to attach to a substrate so called a pallet in order to simulate a flat wafer surface for the purpose of photolithography process. The problem comes in when the glue which adhering the bars to the Micropallette shrinks and causes stress on the bars. This results in bar bending and renders the photolithography to be difficult and give low throughput. Therefore, a technique called Micropallete is use to fix the bars such that they do not bend when glue is cured. The Micropallette is invented and presented herein.